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Showing results 21 to 27 of 27.
Article
Measurement of Particle Emissions from Clean Room Gas-Handling Components
June 01, 1994
Patent
Apparatus and method for uniformly coating a substrate in an evacuable chamber
July 20, 1993
Article
Using electrical fields to control particle deposition on wafers in vacuum chambers
November 01, 1992
Article
Theoretical and experimental study of particle transport in vacuum chambers
January 01, 1992
Article
Generation of Uniformly Sized, Charged-Particles in A Vacuum
January 01, 1991
Article
Measurement of Particle Deposition on Wafers in Vacuum Chambers
January 01, 1991
Article
Effect of Wafer Orientation on the Particle Deposition in Subatmospheric Pressures
January 01, 1990