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An apparatus and method including a droplet coating generator
for generating a stream of electrically charged coating droplets
within an evacuable chamber towards a substrate positioned within
the evacuable chamber. A piezoelectric vibrator and orifice plate
coupled thereto generate the stream of coating droplets. The
coating droplets are urged to move in a sweeping motion across the
substrate by at least one pair of opposing spaced apart electrodes
powered by an electrical power supply. A uniform coating is thus
produced while the evacuable chamber is maintained at
subatmospheric pressure as required during typical semiconductor
processing. Multiple applications of a photoresist coating may be
applied by the coating apparatus without requiring that the
evacuable chamber be repeatedly vented and pumped down to
subatmospheric pressure.
