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TSV-last, heterogeneous 3D integration of a SiGe BiCMOS beamformer and patch antenna for a W-band phased array radar
Malta, D., Vick, E., Lueck, M., Huffman, A., Woodruff, S., Ralston, P., Hartman, J., Bushyager, N., Ebner, G. D., Quade, S., Young, A., Hillman, C., & Hacker, J. (2016). TSV-last, heterogeneous 3D integration of a SiGe BiCMOS beamformer and patch antenna for a W-band phased array radar. In Proceedings of the 66th Electronics Components and Technologies Conference (ECTC 2016) (pp. 1457 - 1464)