RTI uses cookies to offer you the best experience online. By clicking “accept” on this website, you opt in and you agree to the use of cookies. If you would like to know more about how RTI uses cookies and how to manage them please view our Privacy Policy here. You can “opt out” or change your mind by visiting: http://optout.aboutads.info/. Click “accept” to agree.
A piezoelectric micromachined ultrasonic transducer comprising a
substrate and a first dielectric film formed on the substrate. An
opening having a sidewall is formed through the substrate and first
dielectric film. A bottom electrode is formed on the first
dielectric film spanning the opening. A piezoelectric element is
formed on the bottom electrode. A second dielectric film surrounds
the piezoelectric element. A conformal insulating film is formed on
the sidewall of the opening. A conformal conductive film is formed
in contact with the bottom electrode and on the sidewall of the
opening, wherein an open cavity is maintained in the opening. A top
electrode is formed in contact with the piezoelectric element.
