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A cascade thermoelectric cooler designed to cool to cryogenic
temperatures of 30 to 120 K integrates high
performance.backslash.high-ZT Bi.sub.x Sb.sub.2-x Te.sub.3 and
Bi.sub.2 Te.sub.3-x Se.sub.3 -based super-lattice-structure
thin-film thermoelectric devices with a bulk-material based
thermoelectric cooler including plural cascaded cold stages with
each successive cascaded cold stage able to cool to a progressively
lower temperature. Each cold stage in the bulk-material
thermoelectric cooler includes a heat source plate, a heat sink
plate, a p-type thermoelectric, and a n-type thermoelectric.
Moreover, the thin-film thermoelectric cooler can have multiple
stages in which each stage contains a heat source plate, a heat
sink plate, a p-type super-latticed thermoelectric element, and a n
type super-latticed thermoelectric element. By bonding an output
heat source plate on the thin-film thermoelectric cooler to an
input heat sink plate on the bulk-material thermoelectric cooler,
the integration of the thin-film thermoelectric with the
bulk-material-based thermoelectric yields a cascade thermoelectric
cooler wherein the bulk-material-based thermoelectric cooler cools
to 160 K and the thin-film thermoelectric device cools to cryogenic
temperatures between 70 and 120 K. Another level of thin-film
super-lattice integration can achieve temperatures of 30 K.
Alternatively, the integration of a high ZT thin-film superlattice
thermoelectric cooler on a multi-staged bulk-material-based
thermoelectric cooler can produce a higher performance
non-cryogenic cooler.