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Chapter
Copper etching in a split cathode MERIE system using bromine and iodine chemistries
January 01, 1992
Article
Studies of the Possible Reaction of Wf6 with Sio2 and Si3N4 at Several Temperatures
January 01, 1992
Patent
Metal organic chemical vapor deposition for repairing broken lines in microelectronic packages
January 01, 1992