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Chapter
Piezoelectric Micromachined Ultrasound Transducer (pMUT) Arrays for 3D Imaging Probes
October 01, 2006
Article
5I-4 Piezoelectric micromachined ultrasound transducer (pMUT) arrays for 3D imaging probes
October 01, 2006
Patent
Electromagnetic radiation detectors having a microelectromechanical shutter device
April 11, 2006
Chapter
Active Microcantilever Device for Biological Agent Detection
April 01, 2006