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Wafer Bonding of diamond films to silicon for silicon-on-insulator technology
Yushin, G., Wolter, S., Kvit, A., Collazo, R., Sitar, Z., Prater, J., & Stoner, B. (2001). Wafer Bonding of diamond films to silicon for silicon-on-insulator technology. In Proceedings of the Materials Research Society, Symposium A: Materials Issues in Novel Si-based Technologies