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High current density electron emission from an electrodeposited metal nanowire array
Aloui, T., Kirley, M. P., Vick, E., Hilton, A., Colon, P., Kim, W., Parker, C. B., Amsden, J. J., Glass, J. T., & Gilchrist, K. H. (2020). High current density electron emission from an electrodeposited metal nanowire array. Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 38(4), 043204. Article 043204. Advance online publication. https://doi.org/10.1116/6.0000135
High-current electron field emitters are of interest for many applications, but state-of-the-art devices suffer from limitations such as high turn-on macroscopic field, low macroscopic current density, poor emission stability, and short lifetime. Field emitter arrays with a high spatial density of uniform emitters have the potential to address these problems. This work presents the process development, fabrication, and testing of a novel field emitter array. The authors employed electron beam lithography and templated electrodeposition to fabricate a high spatial density array of metallic nanowires, resulting in electron emission with high macroscopic current density (2A/cm(2)) and low turn-on macroscopic field (4.35V/mu m). Templated electrodeposition of metallic nanowire arrays is a promising method for producing high performance field emitters.