RTI uses cookies to offer you the best experience online. By clicking “accept” on this website, you opt in and you agree to the use of cookies. If you would like to know more about how RTI uses cookies and how to manage them please view our Privacy Policy here. You can “opt out” or change your mind by visiting: http://optout.aboutads.info/. Click “accept” to agree.
Fabrication and characterization of metal-to-metal interconnect structures for 3-D integration
Huffman, C., Lannon, J., Lueck, M., Gregory, C., & Temple, D. (2009). Fabrication and characterization of metal-to-metal interconnect structures for 3-D integration. Journal of Instrumentation, 4(Art. No.P03006).
