RTI uses cookies to offer you the best experience online. By clicking “accept” on this website, you opt in and you agree to the use of cookies. If you would like to know more about how RTI uses cookies and how to manage them please view our Privacy Policy here. You can “opt out” or change your mind by visiting: http://optout.aboutads.info/. Click “accept” to agree.
Defect and emission distributions in bulk GaN grown in polar and nonpolar directions
A comparative analysis
Paskova, T., Hanser, A., Preble, E., Evans, K., Kroger, R., Tuomisto, F., Kersting, R., Alcorn, R., Ashley, S., Pagel, C., Valcheva, E., Paskov, P. P., & Monemar, B. (2008). Defect and emission distributions in bulk GaN grown in polar and nonpolar directions: A comparative analysis. In H. Morkoc, CW. Litton, JI. Chyi, Y. Nanishi, & E. Yoon (Eds.), GALLIUM NITRIDE MATERIALS AND DEVICES III SPIE-INT SOC OPTICAL ENGINEERING. https://doi.org/10.1117/12.767628
We have investigated bulk GaN material grown by HVPE either in the conventional polar [0001] direction and subsequently sliced with nonpolar surfaces or grown in the nonpolar [11-20] direction. Spatially resolved techniques such as cathodoluminescence imaging and transmission electron microscopy, as well as profile measuring techniques such as positron annihilation spectroscopy and secondary ion mass spectroscopy were employed to directly visualize the extended structural defects, and point defect (impurity and vacancy) distributions along the growth axes. A comparative analysis of the results shows a distinctive difference in the distribution of all kind of defects along the growth axes. A significant decrease in the defect density in material grown along the polar direction, in contrast to the constant behavior of the high defect density in material grown along the nonpolar direction points out the low-defect superior quality of the former material and indicates the preferable way of producing high-quality GaN substrates with nonpolar surfaces.