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Chopping of Near- and Mid-Infrared Radiation using a Curled Electrostatic MEMS Actuator
Dausch, D., Goodwin-Johansson, S., & Exarhos, G. (2003). Chopping of Near- and Mid-Infrared Radiation using a Curled Electrostatic MEMS Actuator. In Infrared Technology and Applications XXIX https://doi.org/10.1117/12.488786
