Microelectromechanical Systems: Focus Areas
Polymer MEMS Actuators
Polymer MEMS actuators are electrostatic, flexible film actuators that are fabricated on semiconductor or transparent substrates and that operate by alternately curling and uncurling over the substrate surface. The devices operate at 50-250 V and at frequencies greater than 5 kHz. They can be used to modulate light, switch electrical currents, or control fluid flow. Potential applications include
- Optical shutters
- Optical switches
- Microvalves
- Miniature electrical relays
- Tunable radio frequency devices
Microsensors
RTI develops piezoresistive, piezoelectric, electrostatic, and electronic microsensor devices. Constructed from conventional silicon-based materials, smart polymers, and other materials, these devices can be used in
- Tactile displays
- Chemical and biological sensors
- Thermal sensors
- Strain and force sensors
We are also developing microcantilever sensors for detection of biological agents.
Piezoelectric Actuators
RTI integrates piezoelectric thin-film technology with silicon-based materials to produce high-speed, high-force MEMS actuators. We have developed bulk-micromachined piezoelectric membranes on silicon substrates as well as microcantilever devices. Potential applications include micromachined ultrasound transducers, chemical and biological sensors, and micromirror arrays.
Integrated Force Arrays (IFAs)
IFAs are high-strain, high-force actuators that we remove from the support substrate to make them extremely small and lightweight. Strains of up to 10% can be achieved in 10-mm long actuators with mN force levels and kHz frequencies. Potential applications include
- Lightweight, low-power solenoids
- High-speed optical devices
- Artificial muscle robotics
- Micro pumps and valves
- Microsurgical tools
- Position sensors
- Catheters, prostheses, and other biomedical devices