Microelectromechanical Systems (MEMS)

We develop new integrated materials based on microfabrication and microelectromechanical systems (MEMS) technology, and identify innovative applications for next-generation microsensors and microactuators. A number of our unique devices have the potential to make current state-of-the-art components obsolete.

For example, our MEMS microvalves could replace standard solenoid valves, providing longer lifetime and lower power consumption. We are developing miniaturized ultrasound transducers that can be embedded in the tip of intravascular catheters to provide surgical teams with real-time patient imaging.

Production Facilities and Equipment

6-inch wafer fabrication laboratory
2,600 square feet of Class 1000 clean room space
End-to-end capabilities for design, fabrication, packaging, testing, and reliability

Analytical Tools and Equipment

Scanning electron microscopy (SEM)
Transmission electron microscopy (TEM)
Energy dispersive spectroscopy (EDX/EDS)
Atomic force microscopy (AFM)
Auger electron spectroscopy (AES)
X-ray photoelectron spectroscopy (XPS)
X-ray imaging
X-ray fluorescence spectroscopy (XRF)
Profilometery
Ellipsometry

MEMS and Semiconductor Test Equipment

Wafer probing stations
Semiconductor parameter analyzers
Ferroelectric testing workstation
Environmental control chambers

Publications

More publications »

Brochures

MEMS and Biomedical Devices